NTNU NanoLab process database. 2% 950K PMMA Runsheets. ” The material is similar to polycarbonate pmma in that it is suitable for use as an impact resistant alternative to glass ( particularly when pmma the high impact strength of PC is not required). Expose using our test mask. Lithography processing is a. Acrylic is a transparent thermoplastic homopolymer known more commonly by the trade name “ plexiglass. 950k Coat SPR 220- 7 resist according to datasheet and an additional hard bake on hotplate 2. technical product information datasheet fujifilm electronic materials. Die Polymere sind bis 230 ° C thermisch stabil.
Resist available at 950k TNFC 950k PMMA A3. 14 15 Process chemicals Properties I Spin curve pmma 950k Properties datasheet II Characterisation AR- Pe- beam resists for nanometer lithography PMMA resist series 50K – 950K for the production datasheet of integrated circuits and masks. Dabei besitzt das Polymer 50K gegenüber dem 950K eine um 20 % höhere Empfindlichkeit. For spin coating on graphene/ Cu you can use 1500 datasheet . Our PMMA A resists are pmma formulated in anisole, while our 950k PMMA C resists are formulated in chlorobenzene. If so please include an information on the price pmma delivery time. Come resist ( negativo) è necessario usare datasheet il polistirene in quanto il PMMA non resiste altrettanto bene 950k ai processi RIE, necessari a trasferire la maschera sugli strati sottostanti ( Cr).
( PMMA) is the most popular e- beam resist offering very high- resolution ease. What is Acrylic ( PMMA) What is it Used For? I am mostly interested in 9% solution of 200K 500K 950k 950K. Barcelona - Spain. pmma Link to PMMA manufacturer’ s data sheet:. MIBK] ( 950k series PMMA, see. Sie arbeiten positiv. Una volta preparata la maschera risulta delle dimensioni previste e pressoché priva di difetti.
A- Gas Electronic Materials is a distributor for Microchems PMMA and Copolymer products. Accessibility Menu. Select Language:. PMMA 950K / PMMA 495K / Co- Polymers. PMMA ( polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non- imaging microelectronic applications. PMMA is most commonly used as a high resolution positive resist for direct write e- beam as well as x- ray and deep UV microlithographic processes.
pmma 950k datasheet
PMMA is also used as a protective. Spin speed ( rpm) PMMA 950K A2.